ACES
ALPS Clean Energy ETF
stock NYSE ETF

Schwab's ETF screener found ACES CNRG FAN FRNW QCLN RNRG TAN VCLN
If none of those meet your standards it would be a perfect time to use individual stocks. Go through the holdings of clean energy ETFs and pick out the companies that meet your standards, and buy them as fractional shares to fit your desired allocation. That way you would invest in the companies you want and not in the companies you don't want.

Actual clean energy is going to be mainly infrastructure ETFs, so largely Utilities and Industrials with some Technology as well to capture solar manufacturers.
Both QCLN and ACES expand the sectors by adding in Materials and Consumer Discretionary, but that's because they include companies like Tesla and Rivian as electric car manufacturers in their definition of "clean energy". They also have far fewer holdings than ICLN.
Not sure what kind of diversification you're looking for, but the clean energy field is pretty narrow in terms of both sectors and number of companies that fall into that category. It's going to make for a pretty highly concentrated ETF.

Schwab's ETF screener found ACES CNRG FAN FRNW QCLN RNRG TAN VCLN
If none of those meet your standards it would be a perfect time to use individual stocks. Go through the holdings of clean energy ETFs and pick out the companies that meet your standards, and buy them as fractional shares to fit your desired allocation. That way you would invest in the companies you want and not in the companies you don't want.

Actual clean energy is going to be mainly infrastructure ETFs, so largely Utilities and Industrials with some Technology as well to capture solar manufacturers.
Both QCLN and ACES expand the sectors by adding in Materials and Consumer Discretionary, but that's because they include companies like Tesla and Rivian as electric car manufacturers in their definition of "clean energy". They also have far fewer holdings than ICLN.
Not sure what kind of diversification you're looking for, but the clean energy field is pretty narrow in terms of both sectors and number of companies that fall into that category. It's going to make for a pretty highly concentrated ETF.